IEC - International Electrotechnical Commission - IEC 62047-29:2017

Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature

published
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Organization: IEC - International Electrotechnical Commission
Publication Date: 22 November 2017
Status: published
Page Count: 12
ICS Code (Other semiconductor devices): 31.080.99
abstract:

IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under... View More

Document History

IEC 62047-29:2017
November 22, 2017
Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled...
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