IEC - International Electrotechnical Commission - IEC 62047-30:2017

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

published
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Organization: IEC - International Electrotechnical Commission
Publication Date: 15 September 2017
Status: published
Page Count: 20
ICS Code (Other semiconductor devices): 31.080.99
ICS Code (Piezoelectric devices): 31.140
abstract:

IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting... View More

Document History

IEC 62047-30:2017
September 15, 2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to...
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