IEC - International Electrotechnical Commission - IEC 62047-30:2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 15 September 2017 |
| Status: | published |
| Page Count: | 20 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
| ICS Code (Piezoelectric devices): | 31.140 |
abstract:
IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to... View More
Document History
IEC 62047-30:2017
September 15, 2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to...