IEC - International Electrotechnical Commission - IEC 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 17 July 2013 |
| Status: | published |
| Page Count: | 38 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechan
Document History
IEC 62047-11:2013
July 17, 2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical...