IEC - International Electrotechnical Commission - IEC 62374:2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 29 March 2007 |
| Status: | published |
| Page Count: | 43 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
Document History
IEC 62374:2007
March 29, 2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure