IEC - International Electrotechnical Commission - IEC 62047-8:2011
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 14 March 2011 |
| Status: | published |
| Page Count: | 36 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 62047-8:2011 specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the... View More
Document History
IEC 62047-8:2011
March 14, 2011
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
IEC 62047-8:2011 specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the...