IEC - International Electrotechnical Commission - IEC 62047-1:2005
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
revised
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 27 September 2005 |
| Status: | revised |
| Page Count: | 49 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
This part of IEC 62047 defines terms for micro-electromechani
Document History
January 6, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect...
IEC 62047-1:2005
September 27, 2005
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.