ASTM International - ASTM E493/E493M-11(2017)

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

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Organization: ASTM International
Publication Date: 1 June 2017
Status: active
Page Count: 3
ICS Code (Non-destructive testing): 19.100
significance And Use:

6.1 Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance... View More

scope:

1.1 This practice2 covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 10−10 to 10−6 Pa m3/s (10−9 standard cm3/s to 10−5 standard cm3/s at 0°C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances.

1.2 Two test methods are described:

1.2.1 Test Method A-Test part preparation by bombing.

1.2.2 Test Method B-Test part preparation by prefilling.

1.3 Units-The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Document History

ASTM E493/E493M-11(2017)
June 1, 2017
Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
1.1 This practice2 covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the...
July 1, 2011
Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
1.1 This practice covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the...
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