ASTM International - ASTM F1238-95(1999)
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
|Publication Date:||10 December 1999|
|ICS Code (Electronic tubes):||31.100|
1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.
1.2 The values stated in SI units are regarded as standard.