ASTM International - ASTM E2246-11

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

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Organization: ASTM International
Publication Date: 1 November 2011
Status: historical
Page Count: 21
ICS Code (Photographic paper, films and plates. Cartridges): 37.040.20
significance And Use:

Strain gradient values are an aid in the design and fabrication of MEMS devices.

scope:

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

May 1, 2018
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which...
ASTM E2246-11
November 1, 2011
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which...
November 1, 2011
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which...
November 1, 2005
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which...
October 10, 2002
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which...
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