ASTM International - ASTM E2246-11
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
|Publication Date:||1 November 2011|
|ICS Code (Photographic paper, films and plates. Cartridges):||37.040.20|
significance And Use:
Strain gradient values are an aid in the design and fabrication of MEMS devices.
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanic
1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.