ASTM International - ASTM F1844-97(2002)

Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage

historical
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Organization: ASTM International
Publication Date: 10 December 2002
Status: historical
Page Count: 4
ICS Code (Electronic display devices): 31.120
significance And Use:

Resistivity is a primary quantity for characterization and specification of coated glass plates used for flat panel displays. Sheet resistance is also a primary quantity for characterization,... View More

scope:

1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat panel information displays.

1.2 This practice is intended to be used with Test Methods F 673. This practice pertains to a "manual" measurement procedure in which an operator positions the measuring head on the test specimen and then personally activates the test apparatus. The resulting test data may be tabulated by the operator, or, alternatively, sent to a computer-based data logging system. Both Methods I and II of Test Methods F 673 (paragraphs 3.1 through 3.3.3 of Test Methods F 673) are applicable to this practice.

1.3 Sheet resistivity in the range 0.020 to 3000 per square (sheet conductance in the range 3 by 10-4 to 50 mhos per square) may be measured by this practice. The sheet resistance is assumed to be uniform in the area being probed.

Note 1-Typical manual test units, as described in this practice, measure and report in the units "mhos per square"; this is the inverse of "ohms per square."

1.4 This practice is applicable to flat surfaces only.

1.5 This practice is non-destructive. It may be used on production panels to help assure production uniformity.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

May 1, 2016
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat...
June 15, 2008
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat...
ASTM F1844-97(2002)
December 10, 2002
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
Resistivity is a primary quantity for characterization and specification of coated glass plates used for flat panel displays. Sheet resistance is also a primary quantity for characterization,...
December 10, 1997
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat...
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