IEC - International Electrotechnical Commission - IEC 62047-34:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

published
Buy Now
Organization: IEC - International Electrotechnical Commission
Publication Date: 5 April 2019
Status: published
Page Count: 16
ICS Code (Other semiconductor devices): 31.080.99
ICS Code (Piezoelectric devices): 31.140
abstract:

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to... View More

Document History

IEC 62047-34:2019
April 5, 2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test...
Advertisement