IEC - International Electrotechnical Commission - IEC 62047-34:2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 5 April 2019 |
| Status: | published |
| Page Count: | 16 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
| ICS Code (Piezoelectric devices): | 31.140 |
abstract:
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to... View More
Document History
IEC 62047-34:2019
April 5, 2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test...