IEC - International Electrotechnical Commission - IEC 62047-32:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

published
Buy Now
Organization: IEC - International Electrotechnical Commission
Publication Date: 24 January 2019
Status: published
Page Count: 37
ICS Code (Other semiconductor devices): 31.080.99
abstract:

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for... View More

Document History

IEC 62047-32:2019
January 24, 2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS...
Advertisement