IEC - International Electrotechnical Commission - IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 24 January 2019 |
| Status: | published |
| Page Count: | 37 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for... View More
Document History
IEC 62047-32:2019
January 24, 2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS...