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Wavelength stabilization of MEMS Fabry-Pérot filters by capacitive sensingApproach and experimental results
2017 Edition, October 1, 2017 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

Electrostatically actuated MEMS Fabry-Pérot filters are an innovative component for infrared microspectrometers and miniature gas sensors. Fabricated in a bulk micromachining process, difficulties can arise from the mass of moving elements making the device...

CO/sub 2//H/sub 2/O gas sensor with a MEMS Fabry-Perot filter
2002 Edition, Volume 3, January 1, 2002 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for nondispersive infrared (NDIR) CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped...

Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers
2019 Edition, June 1, 2019 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm² to 5×5 mm², enabling integration into TO5-size detector packages, which is about only one quarter...

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
2011 Edition, June 1, 2011 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

A tunable dual-band MEMS Fabry-Pérot filter for simultaneous use of the spectral ranges from 8 µm to 10.5 µm and from 4 µm to 5 µm is reported. A peak transmittance of at least 75 % and a FWHM of less than 200 nm were measured. The...

Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
2010 Edition, November 1, 2010 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

In this paper we describe the design, the fabrication and the properties of tunable MEMS Fabry-Pérot (FP) filters for the long-wave infrared range (LWIR). Based on a mid-wave IR (MWIR) device, completely new optical and electro mechanical designs have to...

Widely Tunable MEMS-Based FabryPerot Filter
2009 Edition, Volume 18, August 1, 2009 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

This paper describes the use of strain stiffening in fixed-fixed beam actuators to extend the tuning range of microelectromechanical-systems-based Fabry-Perot filters. The measured wavelength tuning range of 1.615-2.425 mum is the largest reported...

Wideband Visible Wavelength Range MEMS FabryPerot Tunable Filter With Highly Accurate Calibration System
2013 Edition, Volume 13, August 1, 2013 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

A novel microelectromechanical systems (MEMS) Fabry-Perot tunable filter (FPTF) and calibration system for accurately controlling the wavelength of the transmission peak in the wide wavelength range of visible light are reported. The...

Large-Area MEMS Tunable FabryPerot Filters for Multi/Hyperspectral Infrared Imaging
2017 Edition, Volume 23, March 1, 2017 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a...

MEMS-based high-Q Fabry-Perot filters
2014 Edition, August 1, 2014 - University of Strathclyde Glasgow

The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall...

Wideband visible wavelength range MEMS Fabry-Perot Tunable Filter with calibration system
2012 Edition, October 1, 2012 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

We report the novel MEMS (Micro Electro Mechanical Systems) FPTF (Fabry-Perot Tunable Filter) and its calibration system that controls the wavelength of the transmission peak accurately in the wide wavelength range of visible light. The...

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