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NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration
2008 Edition, December 1, 2008 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

This paper reviews some recent advances related to NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS and NEMS-CMOS integration.

Design methodologies, models and tools for very-large-scale integration of NEM relay-based circuits
2015 Edition, November 1, 2015 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

Integrated circuits based on nano-electro-mechanical (NEM) relays are a promising alternative to conventional CMOS technology in ultra-low energy applications due to their (near) zero stand-by energy consumption. Here we describe the details...

Junctionless Silicon Nanowire Resonator
2014 Edition, Volume 2, March 1, 2014 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

The development of nanoelectromechanical systems (NEMS) is likely to open up a broad spectrum of applications in science and technology. In this paper, we demonstrate a novel double-transduction principle for silicon nanowire resonators, which exploits the depletion charge...

3D Integration technology: Status and application development
2010 Edition, September 1, 2010 - IEEE - Institute of Electrical and Electronics Engineers, Inc.

As predicted by the ITRS roadmap, semiconductor industry development dominated by shrinking transistor gate dimensions alone will not be able to overcome the performance and cost problems of future IC fabrication. Today 3D integration based on through silicon vias...

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