This paper reviews some recent advances related to NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS and NEMS-CMOS integration.
Integrated circuits based on nano-electro-mechani
The development of nanoelectromechanica
As predicted by the ITRS roadmap, semiconductor industry development dominated by shrinking transistor gate dimensions alone will not be able to overcome the performance and cost problems of future IC fabrication. Today 3D integration based on through silicon vias...