Innovative Foundry System Using Piezoelectric MEMS Technology
ROHM Semiconductor USA, LLC

Voltage and ferroelectric characteristics are important factors in determining the performance of piezoelectric MEMS. ROHM is focusing on developing a thinner lead zirconate titanate (PZT) material featuring superior voltage and ferroelectric properties.

IEC 62047-28:2017 - Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
January 20, 2017 - IEC - International Electrotechnical Commission

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret...

High vacuum pumps: Operation, specification and configuration
January 13, 2020 - IEEE GlobalSpec

Turbomolecular high vacuum pump; Source: Busch Vacuum Pumps and SystemsHigh vacuum pumps provide evacuation of chambers or systems into the high vacuum (10-3 to 10-8 torr) or ultra-high vacuum (<10-8 torr) range of pressure. Mechanical pumps and venturi generators operate in...

Linearity Measurements for MEMS Pressure Sensors
All Sensors Corp.

Pressure non-linearity is one of the parameters that impacts sensor accuracy. (For other factors, refer to All Sensors Pressure Point 2: Understanding Accuracy and Precision for MEMS Pressure Sensors.) As such, users need to understand some of the nuances involved with measuring and...

IEC 62047-4:2008 - Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
August 21, 2008 - IEC - International Electrotechnical Commission

IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding...

AKF392B MEMS Digital Accelerometer
Shenzhen Rion Technology Co., Ltd

AKE392B-Wireless three-axis accelerometer sensor series products is RION company imported the Switzerland patented technology to produce for using widely, suitable for vibration testing, impact testing and more fields. The product uses a digital interface output, RS232/485/TTL optional, can be set...

Field Evaluations of a Damped MEMS Shock Sensor
PCB Piezotronics, Inc.

Results from pyrotechnic, penetration and metal-to-metal impact field evaluations are presented which prove the performance of a new piezoresistive (PR) shock accelerometer. The microelectromechanical systems (MEMS) sensor incorporates sufficient squeeze-film damping to reduce...

IEC 62047-36:2019 - Semiconductor devices – Micro-electromechanical devices – Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
April 5, 2019 - IEC - International Electrotechnical Commission

IEC 62047-36:2019 (E) specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document...

ASTM E2246-11(2018) - Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
May 1, 2018 - ASTM International

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope....

Making MEMS Pressure Sensors Easier to Use (Part 1)
All Sensors Corp.

Pressure is one of the most common measurements. Based on their small size, low cost and high reliability, microelectromechanical systems (MEMS) pressure sensors that use the high-volume manufacturing techniques of the semiconductor industry are found in over 90% of today's...