IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nondestructive techniques for electrically-testing dielectric layers on integrated circuits

1972 IEEE International Solid-State Circuits Conference

Author(s): Keen, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1972
Conference Location: Philadelphia, PA, USA, USA
Conference Date: 16 February 1972
Volume: XV
Page(s): 102 - 103
DOI: 10.1109/ISSCC.1972.1155127
Regular:

Three nondestructive optical techniques using liquid crystals for electrically testing or evaluating the characteristics of dielectric layers on integrated circuits will be described. Explanations... View More

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