IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optical determination of the space-charge region in semiconductors by ellipsometry

Author(s): Schueler, D.G. ; Bashara, N.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1969
Conference Location: Washington, DC, USA, USA
Conference Date: 29 October 1969
Page(s): 76 - 78
DOI: 10.1109/IEDM.1969.188134
Regular:

Recent studies indicate that the spatial extent of the space-charge region in semiconductors can be determined from oblique incidence electroreflect-ance measurements with elliptically polarized... View More

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