IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication and Characterization of a Novel Nanoscale Thermal Anemometry Probe

Author(s): Margit Vallikivi ; Alexander J. Smits
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2014
Volume: 23
Page(s): 899 - 907
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2014.2299276
Regular:

The development, fabrication, and characterization of a novel nanoscale thermal anemometry probe (NSTAP) for measuring velocity fluctuations in turbulent flows are described. This miniature MEMS... View More

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