IEEE - Institute of Electrical and Electronics Engineers, Inc. - Particle Swarm Optimization for Design of Slotted MEMS Resonators With Low Thermoelastic Dissipation

Author(s): Jonathan James Lake ; Amy Elizabeth Duwel ; Rob N. Candler
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2014
Volume: 23
Page Count: 8
Page(s): 364 - 371
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2013.2275999
Regular:

The geometry of a slotted MEMS resonator was optimized using a binary particle swarm optimization technique to reduce energy dissipation from thermoelastic dissipation (TED). The optimization... View More

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