IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thermally Tunable Silicon Nitride Sampled Gratings in Polymer

Author(s): Dongliang Liu ; Ziyang Zhang ; Norbert Keil ; Norbert Grote
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2013
Volume: 25
Page(s): 1,734 - 1,736
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/LPT.2013.2275010
Regular:

Sampled gratings based on low-loss buried silicon nitride waveguides in polymer have been fabricated and investigated. Low-temperature plasma enhanced chemical vapor deposition and standard... View More

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