IEEE - Institute of Electrical and Electronics Engineers, Inc. - Machine Vision-Based Defect Detection in IC Images Using the Partial Information Correlation Coefficient

Author(s): Chien-Chih Wang ; Bernard C. Jiang ; Jing-You Lin ; Chien-Cheng Chu
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2013
Volume: 26
Page Count: 7
Page(s): 378 - 384
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/TSM.2013.2261566
Regular:

The normalized cross correlation coefficient is a prevalent pattern-matching algorithm in machine vision for industrial inspections. Despite its common use, there are problems with practical... View More

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