IEEE - Institute of Electrical and Electronics Engineers, Inc. - Back-End Deposited Silicon Photonics for Monolithic Integration on CMOS

Author(s): Y. H. D. Lee ; M. Lipson
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2013
Volume: 19
Page Count: 7
Page(s): 8,200,207
ISSN (Paper): 1077-260X
ISSN (Online): 1558-4542
DOI: 10.1109/JSTQE.2012.2209865
Regular:

We present the vision of back-end deposited silicon photonics (BDSP) and review works that have been done in this field. Individual aspects of BDSP platform including excimer-laser-annealed... View More

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