IEEE - Institute of Electrical and Electronics Engineers, Inc. - MEMS Ring Resonators for Laserless AFM With Sub-nanoNewton Force Resolution

Author(s): E. Algre ; Zhuang Xiong ; M. Faucher ; B. Walter ; L. Buchaillot ; B. Legrand
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2012
Volume: 21
Page Count: 13
Page(s): 385 - 397
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2011.2179012
Regular:

A concept of atomic force microscopy (AFM) oscillating sensors using electromechanical silicon microresonators is presented, and imaging capabilities are demonstrated. The microresonators are... View More

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