IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of Contoured Thermomechanical Actuators and Pulsing Actuation to Enhance Dynamic Performance

Author(s): Shih-Chi Chen ; M. L. Culpepper
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2012
Volume: 21
Page Count: 10
Page(s): 340 - 349
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2011.2175365
Regular:

This paper presents the concepts, models, and experimental validations of the geometric contouring method and a pulsing technique to enhance dynamic performance of micro thermomechanical actuators... View More

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