IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors

Author(s): J. Capilla ; J. Olivares ; M. Clement ; J. Sangrador ; E. Iborra ; A. Devos
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2012
Volume: 59
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2012.2205
Regular:

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators... View More

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