IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Fully Differential CMOS–MEMS DETF Oxide Resonator With $Q > \hbox{4800}$ and Positive TCF

Author(s): Wen-Chien Chen ; Ming-Huang Li ; Yu-Chia Liu ; Weileun Fang ; Sheng-Shian Li
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2012
Volume: 33
Page Count: 3
Page(s): 721 - 723
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/LED.2012.2188774
Regular:

A fully differential CMOS-MEMS double-ended tuning-fork (DETF) oxide resonator fabricated using a 0.18-μm CMOS process has been demonstrated with a Q greater than 4800 and... View More

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