IEEE - Institute of Electrical and Electronics Engineers, Inc. - Mechanical and Ferroelectric Behavior of PZT-Based Thin Films
Author(s): | S. Yagnamurthy ; I. Chasiotis ; J. Lambros ; R. G. Polcawich ; J. S. Pulskamp ; M. Dubey |
Sponsor(s): | IEEE Electron Devices Society |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 December 2011 |
Volume: | 20 |
Page Count: | 9 |
Page(s): | 1,250 - 1,258 |
ISSN (Paper): | 1057-7157 |
ISSN (Online): | 1941-0158 |
DOI: | 10.1109/JMEMS.2011.2167666 |
Regular:
The mechanical and ferroelectric behavior of freestanding lead zirconate titanate (PZT) -based thin film unimorph structures for microelectromechanic