IEEE - Institute of Electrical and Electronics Engineers, Inc. - Mechanical and Ferroelectric Behavior of PZT-Based Thin Films

Author(s): S. Yagnamurthy ; I. Chasiotis ; J. Lambros ; R. G. Polcawich ; J. S. Pulskamp ; M. Dubey
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2011
Volume: 20
Page Count: 9
Page(s): 1,250 - 1,258
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2011.2167666
Regular:

The mechanical and ferroelectric behavior of freestanding lead zirconate titanate (PZT) -based thin film unimorph structures for microelectromechanical systems was investigated with... View More

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