IEEE - Institute of Electrical and Electronics Engineers, Inc. - Enhanced Sensitivity of SAW-Based Pirani Vacuum Pressure Sensor

Author(s): K J Singh ; O Elmazria ; F Sarry ; P Nicolay ; K Ghoumid ; B Belgacem ; D Mercier ; J Bounouar
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Volume: 11
Page(s): 1,458 - 1,464
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2010.2086055
Regular:

The authors have already presented a novel surface acoustic wave device for vacuum pressure measurement by employing a piezoelectric substrate that has a high value of temperature coefficient of... View More

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