IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators

Author(s): F. Herrault ; B.C. Yen ; Chang-Hyeon Ji ; Z.S. Spakovszky ; J.H. Lang ; M.G. Allen
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2010
Volume: 19
Page Count: 10
Page(s): 4 - 13
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2009.2036583
Regular:

This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and... View More

Advertisement