IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Miniaturized Lamellar Grating Based Fourier Transform Spectrometer With Electrostatic Actuation

Author(s): Wang Shouhua ; Yu Hongbin ; Chau Fook Siong
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2010
Volume: 10
Page(s): 1,869 - 1,874
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2010.2049991
Regular:

We report a miniaturized oscillating Fourier transform spectrometer (FTS), of which the novel features are specially designed suspension springs with reduced thickness and a square honey-combed... View More

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