This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This test method covers the measurement of the effective surface roughness of an opaque reflecting surface as determined by the total integrated light scattering (TIS).

1.2 Applications:

1.2.1 This test me...

Numerical methods for Differential-Algebraic systems with discontinuous right-hand sides is discussed. A class of continuous Rosenbrock methods are constructed, and numerical experiments show that the continuous Rosenbrock methods are effective. Applying the methods, a fast and high-precision numeri...

This paper aims to study a novel expansion discrete grey forecasting model, which could aggregate input information more effectively. In general, existing multi-factor grey forecasting models, such as one order and h variables grey forecasting model (GM (1, h)), always aggregate the main system vari...

The stress in the thickness direction is an important factor influencing the fracture behavior of structural members. A stress σy tensioned flat plate with edge cracks is widely used as an analysis model. The stresses σx and σy for the plate model can be acquired from Neuber's s...