IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characteristics of the Fluorinated High- $k$ Inter-Poly Dielectrics

Author(s): Chih-Ren Hsieh ; Yung-Yu Chen ; Kwung-Wen Lu ; G Lin ; Jen-Chung Lou
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2010
Volume: 31
Page Count: 3
Page(s): 1,446 - 1,448
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/LED.2010.2074181
Regular:

In this letter, the reliabilities and insulating characteristics of the fluorinated aluminum oxide (Al2O3) and hafnium oxide (HfO2) inter-poly dielectric (IPD) are... View More

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