IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Two-Axis CMOS Accelerometer Based on Thermal Convection

Author(s): Shu-Jung Chen ; Chih-Hsiung Shen
Sponsor(s): IEEE Instrumentation and Measurement Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2008
Volume: 57
Page Count: 6
Page(s): 1,572 - 1,577
ISSN (Paper): 0018-9456
ISSN (Online): 1557-9662
DOI: 10.1109/TIM.2008.925347
Regular:

Accelerometers based on thermal convection use a tiny bubble of heated air and pairs of temperature sensors hermetically sealed inside the sensor package cavity. In this paper, we successfully... View More

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