IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Silicon Thermal Accelerometer Without Solid Proof Mass Using Porous Silicon Thermal Isolation

Author(s): D. Goustouridis ; G. Kaltsas ; A.G. Nassiopoulou
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2007
Volume: 7
Page(s): 983 - 989
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2007.896559
Regular:

A Si thermal accelerometer without solid proof mass, based on porous silicon (PS) technology has been developed and characterized. The device is compatible with silicon technology and it consists... View More

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