IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process

Author(s): S. Chang ; S. Sivoththaman
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2006
Volume: 27
Page(s): 905 - 907
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/LED.2006.884712
Regular:

A novel tunable radio frequency microelectromechanical system inductor based on the bimorph effect of an amorphous silicon (a-Si) and aluminum structural layer is presented. The outer turns... View More

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