IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachined thermal shear-stress sensor for underwater applications

Author(s): Yong Xu ; Qiao Lin ; Guoyu Lin ; R.B. Katragadda ; Fukang Jiang ; S. Tung ; Yu-Chong Tai
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2005
Volume: 14
Page(s): 1,023 - 1,030
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2005.856644
Regular:

This paper reports the development of micromachined thermal shear-stress sensors for underwater applications. The thermal shear-stress sensor is a polysilicon resistor sitting atop a... View More

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