IEEE - Institute of Electrical and Electronics Engineers, Inc. - Technology decisions to minimize 450-mm wafer size transition risk

Author(s): J.S. Pettinato ; D. Pillai
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2005
Volume: 18
Page(s): 501 - 509
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/TSM.2005.858471
Regular:

About every ten years, the semiconductor industry has increased its wafer diameter size. This change, when coupled with device innovations such as transistor design improvements, new materials,... View More

Advertisement