IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachined acoustic wave resonator isolated from substrate

Author(s): Wei Pang ; Hao Zhang ; Eun Sok Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2005
Volume: 52
Page Count: 8
Page(s): 1,239 - 1,246
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2005.1509782
Regular:

This paper describes high Q, free-standing, narrow beam supported film bulk acoustic-wave resonators (FBARs) fabricated with silicon micromachining. The resonators are composed of... View More

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