IEEE - Institute of Electrical and Electronics Engineers, Inc. - Advances in precise positioning using the electrostatic glass motor

Author(s): R. Moser ; L. Sache ; A. Cassat ; T. Higuchi ; H. Bleuler
Sponsor(s): IEEE Industry Applications Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2005
Volume: 41
Page(s): 972 - 977
ISSN (Paper): 0093-9994
ISSN (Online): 1939-9367
DOI: 10.1109/TIA.2005.851015
Regular:

This paper reports the continuation of the authors' work in the field of linear and rotary submicrometric positioning using electrostatic glass motors. Electrostatic glass motors, a recent... View More

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