IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of dynamics and power handling of RF MEMS using vector measurement techniques

Author(s): D. Girbau ; A. Lazaro ; L. Pradell
Sponsor(s): IEEE Microwave Theory and Techniques Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2004
Volume: 52
Page(s): 2,627 - 2,633
ISSN (Paper): 0018-9480
ISSN (Online): 1557-9670
DOI: 10.1109/TMTT.2004.837198
Regular:

This paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature... View More

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