IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrostatic charge and field sensors based on micromechanical resonators

Author(s): P.S. Riehl ; K.L. Scott ; R.S. Muller ; R.T. Howe ; J.A. Yasaitis
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2003
Volume: 12
Page Count: 13
Page(s): 577 - 589
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2003.818066
Regular:

We have developed highly sensitive electrometers and electrostatic fieldmeters (EFMs) that make use of micromechanical variable capacitors. Modulation of the input capacitance, a technique used in... View More

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