IEEE - Institute of Electrical and Electronics Engineers, Inc. - Sputter deposition conditions and penetration depth in NbN thin films

Author(s): R. Hu ; G.L. Kerber ; J. Luine ; E. Ladizinsky ; J. Bulman
Sponsor(s): Council on Superconductivity
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2003
Volume: 13
Page Count: 4
Page(s): 3,288 - 3,291
ISSN (Paper): 1051-8223
ISSN (Online): 1558-2515
DOI: 10.1109/TASC.2003.812227
Regular:

NbN films have been reactively sputter deposited from a 15.24 cm Nb target using a variety of deposition conditions. Film penetration depth has been measured using Taber's parallel plate resonator... View More

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