IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electric probe measurements of high-voltage sheath collapse in cathodic arc plasmas due to surface charging of insulators

Author(s): T.W.H. Oates ; J. Pigott ; D.R. McKenzie ; M.M.M. Bilek
Sponsor(s): IEEE Nuclear and Plasma Sciences Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2003
Volume: 31
Page Count: 6
Page(s): 438 - 443
ISSN (Paper): 0093-3813
ISSN (Online): 1939-9375
DOI: 10.1109/TPS.2003.813199
Regular:

High-voltage sheath dynamics near a negatively biased substrate in cathodic arc plasmas are investigated using a biased electrical probe. Since the sheath is devoid of electrons, the sheath... View More

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