IEEE - Institute of Electrical and Electronics Engineers, Inc. - Parylene gas chromatographic column for rapid thermal cycling

Author(s): Hong-seok Noh ; P.J. Hesketh ; G.C. Frye-Mason
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2002
Volume: 11
Page Count: 8
Page(s): 718 - 725
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2002.805052
Regular:

This paper presents a parylene gas chromatographic column with an embedded heating element. The parylene coating on a silicon microchannel and parylene/parylene thermal bonding technique were... View More

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