IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachining of glass inertial sensors

Author(s): E. Belloy ; A. Sayah ; M.A.M. Gijs
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2002
Volume: 11
Page Count: 6
Page(s): 85 - 90
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.982867
Regular:

We demonstrate the feasibility of a powder blasting micro-erosion process for the micromachining of accelerometer devices in glass. Using high-speed abrasive microparticles and a metal contact... View More

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