IEEE - Institute of Electrical and Electronics Engineers, Inc. - Large tilt angle electrostatic force actuated micro-mirror

Author(s): Tae-Sik Kim ; Sang-Shin Lee ; Youngjoo Yee ; Jong-Uk Bu ; Chil-Geun Park ; Man-Hyo Ha
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2002
Volume: 14
Page(s): 1,569 - 1,571
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/LPT.2002.803913
Regular:

A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom... View More

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