IEEE - Institute of Electrical and Electronics Engineers, Inc. - Semiconductor microlenses fabricated by one-step focused ion beam direct writing

Author(s): Yongqi Fu ; N.K. Bryan
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2002
Volume: 15
Page Count: 3
Page(s): 229 - 231
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.999597
Regular:

We fabricated a refractive semiconductor micro-lenses using a focused ion beam (FIB) direct writing technique. The simple one-step FIB process produced high-quality micro-lenses of silicon, the... View More

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