IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimizing multichamber work cell management: an application to a DRAM wafer fab

Author(s): C. Arbib ; G. Iuliano ; A. Da Soghe
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2001
Volume: 14
Page Count: 8
Page(s): 265 - 272
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.939826
Regular:

The management of a work cell consisting of multichamber systems Endura 5500 PVD is addressed with the goals of maximizing production volume and facilitating maintenance plans. These objectives... View More

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