IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon-on-Nothing (SON)-an innovative process for advanced CMOS

Author(s): M. Jurczak ; T. Skotnicki ; M. Paoli ; B. Tormen ; J. Martins ; J.L. Regolini ; D. Dutartre ; P. Ribot ; D. Lenoble ; R. Pantel ; S. Monfray
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2000
Volume: 47
Page Count: 9
Page(s): 2,179 - 2,187
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.877181
Regular:

A novel CMOS device architecture called silicon on nothing (SON) is proposed, which allows extremely thin (in the order of a few nanometers) buried dielectrics and silicon films to be fabricated... View More

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