IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spreading-resistance temperature sensor on silicon-on-insulator

Author(s): P.T. Lai ; Bin Li ; C.L. Chan ; J.K.O. Sin
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 1999
Volume: 20
Page Count: 3
Page(s): 589 - 591
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/55.798053
Regular:

A spreading-resistance temperature (SRT) sensor is fabricated on silicon-on-insulator (SOI) substrate and achieves promising characteristics as compared with similar SRT sensor on... View More

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